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Deposition & Etch Metrology Wet Process Wafer Process

White Knight Pumps

White Knight manufactures high purity and ultra-high purity fluid handling equipment for delivering and recirculating chemicals. Our pumps are air operated bellows and diaphragm pumps with models that are capable of high pressures up to 6.9 bars (100 psi) and can recover from deadhead situations without intervention. High temperature products are capable of handling chemistries at temperatures of up to 200 degrees Celsius (400 degrees Fahrenheit) and capable of running dry without damage.

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Pump Products

Pump Industry

Purity level

Max Flow Rate

Max Temp

Max Pressure

Air Source

Warranty

Fluid Path

Non Fluid Path

AT Series

Semiconductor

Ultra High

120 LPM

210 C

60 PSI

Single

1 Year

PTFE/PFA

PTFE/Ceramic

AP Series

Semiconductor

Ultra High

120 LPM

100 C

60 PSI

Single

1 Year

PTFE/PFA

PTFE/PP/Ceramic

APFM Series

Semiconductor

Ultra High

120 LPM

100 C

60 PSI

Single

1 Year

PTFE/PFA

PTFE/Ceramic

X Series

Semiconductor

Ultra High

40 LPM

100 C

60 PSI

Single

1 Year

PTFE/PFA

PTFE/PP/Ceramic

PL Series

Semiconductor, Solar, LED

Ultra High

120 LPM

160 C

100 PSI

Single

2 Year

PTFE/PFA

PTFE/PP/Ceramic

PL Series (Dual Slave)

Semiconductor, Solar, LED

Ultra High

120 LPM

180 C

100 PSI

Dual

2 Year

PTFE/PFA

PTFE/PP/Ceramic

PX Series

Semiconductor, Solar, LED

Ultra High

120 LPM

180 C

100 PSI

Dual

2 Year

PTFE/PFA

PTFE/PP/SS

PF Series

Semiconductor, Solar, LED

Ultra High

120 LPM

180 C

100 PSI

Dual

2 Year

PTFE/PFA

PTFE/PP