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Novellus Refurbishment

Specializing in Novellus Concept One and Concept Two CVD system refurbishment, we leverage our highly specialized in-house remanufacturing and field services team to consistently deliver the highest quality at significant savings over the cost of a new unit.All of our refurbished equipment is guaranteed to meet original published manufactured specifications. In addition, we offer a full range of OEM upgrades, retrofits, field engineering support, custom maintenance contracts, and over 90 percent of the spare parts used on the Novellus Concept Once system. All refurbished systems include installation and warranty.

We provide refurbishment services for a wide range of critical sub-assemblies, including pumps, chillers, heat exchangers, Novellus one arm robots, and RF generators. Exchange programs are available to minimize down-time during planned or maintenance or emergencies.

System Rebuild
We provide refurbishment services for a wide range of critical sub-assemblies, including pumps, chillers, heat exchangers, Novellus one arm robots, and RF generators. Exchange programs are available to minimize down-time during planned or maintenance or emergencies.
Offerings

    High-quality, pre-owned refurbished     systems

    Installation, service support, and     warranty

    Rebuild and maintenance service on     customer-owned systems

    Wafer size conversions

    System upgrades

    High-quality, low-cost consumable parts
Programs & Services
We offer an extensive portfolio of refurbishment programs and services to help customers optimize operational efficiency and reduce system down-time.  
Deposition & Etch Metrology Wet Process Wafer Process