KLA/Tencor

Home About Us Products Service Clients News Contact Us

Deposition & Etch Metrology Wet Process Wafer Process

SPEC offers fully refurbished KLA-Tencor tested tools with guaranteed performance at exceptional value. In addition to high-quality pre-owned tools, SPEC also offers system hardware performance upgrades to extend the capabilities of existing equipment.

Download Brochure >>

KLA-Tencor Products Offered

KLA-Tencor Particle Measurement Systems

for Non-Pattern or Pattern wafers

Non-Pattern Units:

Surfscan 4000, 5000, 6000, SP1 and SP1 TBI Series

Pattern Units:

Surfscan 7000 and AIT Series

KLA Defect Inspection System

SPEC’s Services Group provides second source services, spares, and technical support to the semiconductor fabrication marketplace. SPEC specializes in field service, support, calibration and maintenance of KLA-Tencor metrology tools Onsite or In-house.

SPEC has been supporting KLA-Tencor equipment

and will provide you with the parts, parts repair or

exchange for obsolete Tencor and KLA Surfscan

inspection equipment.