Copyright Plaspro GmbH 2012
The HRT 3000 is real time, optical, and noncontact. It measures various surface topographies and reflectivities, and easily
addresses sharp steps and geometries up to 2000 microns in Z height. The Optical Stylus technology is based on a single
point confocal technique and has no moving parts.
The HRT 3000 is available as a standalone metrology system or in OEM modules. Application specific solutions are available. Inquire regarding your application today
• Patented live video shows inspection location and simplifies set-
• Large measurement range from 0.100’s to 1000um’s
• Large dynamic range accommodate mirror surfaces or low reflection substrates
• Measurement modes include static, scan profile, and area scan
• Measurement results displayed real-
• Standard calculations can be applied to results
• Includes Tamar’s vision metrology for X/Y measurements
• Recipes can be ran for automatic operation
• Optical flat stage available as option
• HRT 3000 modules can run on TamarWaferScan platform
• Best ROI
