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GaSonics is the industry leader in low-cost ashing and etching systems. SPEC can support your reliable GaSonics equipment in the field by providing upgrades, re-manufacturing or re-tooling.
We also provide parts, parts repair or exchange for Obsolete GaSonics and other ashing and etching systems.. Gasonics Aura 1000 , Gasonics A1000 , GaSonics A1000 , Gasonics Aura1000 , Gasonics 2000LL , Gasonics AE2001 , Gasonics AE2000LL , Gasonics L3510
Gasonics Ashers & Etchers
The Gasonics Aura 2000 LL stripper is a single wafer loadlocked system, designed
to address the demands for ultra clean, damage-free photoresist removal. This all
new loadlock system utilizes proven components of the Aura 1000 system, including
a highly reliable downstream microwave process
The Gasonics L3510 is a versatile downstream photoresist removal system, designed
for clean, damage-free removal of the most difficult resist structures. Utilizing
the production-proven L-series platform, the L3510 has a wide process window due
to its patented large diameter microwave plasma source.
The Gasonics Aura 1000 single-wafer photoresist asher is an automated tool designed
as a flexible downstream plasma photoresist removal system for high-volume wafer
fabrication. This tool was designed in direct response to manufacturer’s concern
about wafer sensitivity to processing damage, reliability, and low cost of ownership
