Copyright Plaspro GmbH 2012
SPEC Equipment has developed a new and improved PC-based system, the SPEC 3510 PC. This new system replaces the legacy GaSonics L3510 and surpasses it in performance and efficiency. The 3510 PC is a customizable downstream photo-resist removal system that utilizes time-tested process hardware components while replacing legacy control items and other obsolete devices and hardware. With numerous modernizations such as a newly designed contemporary control system using a full-color Graphic User Interface, real-time graphing, saved data recall, this system is unparalleled in the industry.
SPEC 3510 PC Downstream Ashing System
Single Wafer
Single Wafer
- PC-
based system (Windows); Windows Upgrade Kit available - Full-
color, touch screen GUI with keyboard and touch pad - Full diagnostics software
- Real-
time graphics and feedback - Exceptional reliability, serviceability, and performance.
- Requires only one DC power supply
- Unlimited process recipes
- SECS II interface
- Field upgradable « 2 hours)
- Capable of up to 4 MFC's
- High throughput, excellent uniformity
- 75-
200mm wafer capabilities
Features
